Method of depositing heater material over a photoresist...

Details Method of depositing heater material over a photoresist... Method of depositing heater material over a photoresist...

2005-02-18

2008-12-23

Ahmed, Shamim (Department: 1792)

Etching a substrate: processes

Forming or treating thermal ink jet article

C029S890100, C347S054000, C347S065000, C216S041000

Reexamination Certificate

active

07468139

ABSTRACT:
A method of forming a nozzle for an inkjet printhead is provided. The nozzle comprises a suspended heater element, which is formed by depositing heater material over a sacrificial photoresist scaffold, the scaffold having sloped side faces. The sloped side faces improve deposition of the heater material between the heater element and adjacent electrodes.

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