Method of depositing hard wear-resistant coatings on substrates

Details Method of depositing hard wear-resistant coatings on substrates Method of depositing hard wear-resistant coatings on substrates

1980-08-01

1982-08-24

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

204192N, C23C 1114

Patent

active

043461239

ABSTRACT:
A method of depositing hard, wear-resistant coatings on workpieces and utility articles by evaporating a metal such as titanium in a reactive atmosphere. To make the coating hard as far as possible, wear resistant, and less susceptible to oxidation, the deposition is effected in an atmosphere containing nitrogen, oxygen and carbon, with the atomic number proportion of O to C ranging between 0.5 and 1.5. An evaporation by means of a low voltage arc discharge and the use of CO as the residual gas atmosphere are particularly advisable.

REFERENCES:
patent: 3900592 (1975-08-01), Kennedy et al.
patent: 3925187 (1975-12-01), Bernard
patent: 3988955 (1976-11-01), Ensel et al.
patent: 4226082 (1980-10-01), Nishida

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