Coating processes – Electrical product produced – Piezoelectric properties
Reexamination Certificate
1994-10-05
2001-06-26
Meeks, Timothy (Department: 1762)
Coating processes
Electrical product produced
Piezoelectric properties
C427S526000, C427S576000, C427S535000, C427S552000, C427S250000, C427S282000, C427S327000, C310S312000
Reexamination Certificate
active
06251472
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to a method for forming the electrode pattern of a piezoelectric element for a ultrasonic motor employed as an ultrasonic wave source in the driving system of a camera or a copy machine.
2. Description of the Related Art
The electrode pattern of a piezoelectric element used for an ultrasonic motor generally has a complex shape.
It is, therefore, inconceivable to form the electrode pattern for the ultrasonic motor through a single process. In a method which has heretofore been contrived, the electrode pattern is formed by applying an electrode film to the whole surface of the piezoelectric element either by a vacuum evaporation or sputtering process; and, after that, the electrode surface is patternized by photo-etching.
The method for forming the electrode pattern which has heretofore been contrived thus necessitates photo-etching. However, it requires many processes, thus necessitating much time, labor and an increased cost.
SUMMARY OF THE INVENTION
This invention is directed to the solution of the above-stated problem. It is, therefore, an object of the invention to provide a method of forming the electrode pattern of a piezoelectric element for an ultrasonic motor in a plurality of pattern shapes solely by means of a vacuum evaporation device through a single process.
It is another object of the invention to provide a method of forming the electrode pattern of a piezoelectric element for an ultrasonic motor with the number of electrode pattern forming processes and the processing time thereof reduced to a great degree by excluding a photo-etching process.
These and other objects and features of this invention will become apparent from the following detailed description of embodiments thereof taken in connection with the accompanying drawings.
REFERENCES:
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patent: 3832761 (1974-09-01), Sheahan et al.
patent: 3864161 (1975-02-01), Thompson
patent: 4406059 (1983-09-01), Scott et al.
patent: 4450374 (1984-05-01), Cho et al.
patent: 4466874 (1984-08-01), Belke, Jr. et al.
patent: 4627379 (1986-12-01), Roberts et al.
patent: 4853579 (1989-08-01), Kawasaki et al.
patent: 4886587 (1989-12-01), Miyawaki
CRC Handbook of Chemistry and Physics 1982 p. P-190, P-191.
Barr Michael
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Meeks Timothy
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