Method of depositing DLC on substrate

Details Method of depositing DLC on substrate Method of depositing DLC on substrate

2005-04-12

2005-04-12

Chen, Bret (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

C427S533000, C427S255700

Reexamination Certificate

active

06878404

ABSTRACT:
Durability and/or longevity of a diamond-like carbon (DLC) layer can be improved by varying the voltage and/or ion energy used to ion beam deposit the DLC layer. For example, a relatively low voltage may be used to ion beam deposit a first portion of the DLC layer on the substrate, and thereafter a second higher voltage(s) used to ion beam deposit a second higher density portion of the DLC layer over the first portion of the DLC layer. In such a manner, ion mixing at the bottom of the DLC layer can be reached, and the longevity and/or durability of the DLC improved.

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