Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1994-12-08
1997-09-02
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427566, 427568, 427577, 427575, 427255, 4272551, 4272552, 4272557, C23C 1600, C23C 1430, B05D 306
Patent
active
056629656
ABSTRACT:
Crystalline carbon-based thin film structures are formed in which a compositionally-graded intermediate layer is first deposited on a substrate, and a crystalline carbon-based thin film such as silicon carbide or diamond is deposited thereafter on the intermediate layer. The compositionally-graded intermediate layer has a carbon content which increases in a direction away from the substrate. The compositionally-graded intermediate layer is effective in reducing problems associated with the lattice mismatch between the thin film and the substrate which hamper conventional hetero-epitaxial growth of high quality crystalline carbon-based thin films.
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Deguchi Masahiro
Hirao Takashi
Kitagawa Masatoshi
King Roy V.
Matsushita Electric - Industrial Co., Ltd.
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