Method of depositing an abrasive layer

Details Method of depositing an abrasive layer Method of depositing an abrasive layer

1979-06-13

1981-04-07

Pianalto, Bernard D.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 41, B05D 306

Patent

active

042606470

ABSTRACT:
In a method for the glow discharge deposition of an amorphous, continuous layer from an organosilane and oxygen where the deposition is interrupted, wherein a glow discharge in oxygen is employed prior to resumption of glow discharge layer deposition.

REFERENCES:
patent: 3262808 (1966-07-01), Crooks et al.
patent: 3686018 (1972-08-01), Lindblom et al.
patent: 4013463 (1977-03-01), Leder
patent: 4137365 (1979-01-01), Fletcher et al.
patent: 4138306 (1979-02-01), Niwa

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