Method of depicting a pattern with electron beam and...

Details Method of depicting a pattern with electron beam and... Method of depicting a pattern with electron beam and...

2005-11-22

2005-11-22

Letscher, George (Department: 2653)

Dynamic magnetic information storage or retrieval

Record medium

Reexamination Certificate

active

06967815

ABSTRACT:
A desired pattern of elements, including an element having a slant side intersecting a recording track, is depicted on a resist layer on a disc-like substrate. The element is depicted by causing an electron beam whose beam diameter is smaller than the minimum width of the element to scan the resist layer so that the trajectory of the beam center of the electron beam on the resist layer draws a periodic waveform traveling along an axis parallel to the recording track. The periodic waveform is drawn from a starting point which is on a valley or a peak of the waveform. Anglesθ3, θ1andθ2satisfy the relationθ1<θ3<θ2.

REFERENCES:
patent: 3983328 (1976-09-01), Newell
patent: 6347016 (2002-02-01), Ishida et al.
patent: 2001/0028964 (2001-10-01), Nagao et al.
patent: 63-183623 (1988-07-01), None
patent: 2001-110050 (2001-04-01), None

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