Method of delivering source reagent vapor mixtures for chemical

Details Method of delivering source reagent vapor mixtures for chemical Method of delivering source reagent vapor mixtures for chemical

1998-02-03

2000-01-04

Meeks, Timothy

Coating processes

Coating by vapor, gas, or smoke

42725523, 42725531, C23C 1640

Patent

active

060107480

ABSTRACT:
A showerhead disperser device for mixing plural vapor streams, comprising: a housing including front and rear walls in spaced apart relation to one another, and a side wall therebetween, defining within the housing an interior volume; the front wall having a multiplicity of vapor mixture discharge openings therein, for discharging mixed vapor from the interior volume of the housing exteriorly thereof, flow passages joined to the housing for introducing into the interior volume of the housing respective fluids to be mixed therein; and at least one baffle plate mounted in the interior volume of the housing, intermediate the front and rear walls of the housing, the baffle plate having an edge in spaced relation to the side wall to form an annular flow passage therebetween and the baffle plate having at least one of the respective fluids directed thereagainst upon introduction to the interior volume of the housing, for distribution thereof in the interior volume of the housing. The baffled showerhead disperser is usefully employed to enable formation of CVD thin films of highly uniform composition and thickness.

REFERENCES:
patent: 3098763 (1963-07-01), Deal et al.
patent: 3578495 (1971-05-01), Pammer et al.
patent: 4313783 (1982-02-01), Davies et al.
patent: 4798165 (1989-01-01), DeBoer et al.
patent: 4807562 (1989-02-01), Sandys
patent: 4820371 (1989-04-01), Rose
patent: 4825809 (1989-05-01), Mieno
patent: 4909914 (1990-03-01), Chiba et al.
patent: 4987856 (1991-01-01), Hey et al.
patent: 4989541 (1991-02-01), Mikoshiba et al.
patent: 4991541 (1991-02-01), Sugata et al.
patent: 4993358 (1991-02-01), Mahawili
patent: 5000113 (1991-03-01), Wang et al.
patent: 5105761 (1992-04-01), Charlet et al.
patent: 5106453 (1992-04-01), Benko et al.
patent: 5134963 (1992-08-01), Barbee et al.
patent: 5174825 (1992-12-01), White, Jr. et al.
patent: 5186756 (1993-02-01), Benko et al.
patent: 5225396 (1993-07-01), Ohtani
patent: 5268034 (1993-12-01), Vukelic
patent: 5286519 (1994-02-01), Vukelic
patent: 5366557 (1994-11-01), Yu
patent: 5387289 (1995-02-01), Schmitz et al.
patent: 5422139 (1995-06-01), Fischer
patent: 5453124 (1995-09-01), Moslehi et al.
patent: 5453347 (1995-09-01), Bullington et al.
patent: 5462014 (1995-10-01), Awaya et al.
patent: 5562952 (1996-10-01), Nakahigashi et al.
patent: 5593741 (1997-01-01), Ikeda
patent: 5674563 (1997-10-01), Tarui et al.

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