Method of defining features on materials with a femtosecond...

Details Method of defining features on materials with a femtosecond... Method of defining features on materials with a femtosecond...

2006-05-23

2006-05-23

Evans, Geoffrey S. (Department: 1725)

Electric heating

Metal heating

By arc

Reexamination Certificate

active

07049543

ABSTRACT:
The invention relates to a pulsed laser ablation method of metals and/or dielectric films from the surface of a wafer, printed circuit board or a hybrid substrate. By utilizing a high-energy ultra-short pulses of laser light, such a method can be used to manufacture electronic circuits and/or electro-mechanical assemblies without affecting the material adjacent to the ablation zone.

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