Method of defect determination and defect engineering on product

Details Method of defect determination and defect engineering on product Method of defect determination and defect engineering on product

1994-10-03

1996-11-19

Thomas, Tom

Fishing, trapping, and vermin destroying

437 52, 437203, H01L 2126, G01R 3126

Patent

active

055762239

ABSTRACT:
In a method of determining the possible formation of crystalline defects in a body of a semiconductor material during the process of fabricating integrated circuits in the body, at least one body is subjected to a full fabrication process to form completed integrated circuits in the body which can be electrically tested to determine whether the operation of the integrated circuit is adversely affected by the formation of crystalline defects. Test structures, each of which is only a portion of the complete integrated circuit, are formed during the formation of the complete circuit but are fabricated using only a group of a limited number of the steps of the fabrication process used to fabricate the complete integrated circuit with various ones of the test structures being subjected to different ones of the steps of the group of steps. The test structures may be formed on the same body as the complete circuit or on additional bodies. The test structures are then analyzed to determine which of the steps may have formed crystalline defects in the body.

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