Fishing – trapping – and vermin destroying
Patent
1994-12-21
1996-09-24
Fourson, George
Fishing, trapping, and vermin destroying
437228, 437235, 148DIG50, H01L 2144
Patent
active
055590551
ABSTRACT:
The RC time constant of a semiconductor device is reduced by decreasing the capacitance C. The decrease in capacitance is achieved by replacing the interlayer silicon dioxide (dielectric constant of 4.0) with air (dielectric constant of 1.0). Alternatively, the air space can also be filled with another low dielectric constant material, such as an organic material having a dielectric constant in the range of about 2.2 to 3.4. In either case, the final effective dielectric constant of the device is lowered. As a result of lowering the effective dielectric constant, a smaller RC time constant is achieved, which results in higher device speed.
REFERENCES:
patent: 4820611 (1989-04-01), Arnold, III et al.
patent: 4974055 (1990-11-01), Haskell
patent: 4977108 (1990-12-01), Haskell
patent: 4996133 (1991-02-01), Brighton et al.
patent: 5028555 (1991-07-01), Haskell
patent: 5055427 (1991-10-01), Haskell
patent: 5057902 (1991-10-01), Haskell
patent: 5081516 (1992-01-01), Haskell
patent: 5117276 (1992-05-01), Thomas et al.
patent: 5171713 (1992-12-01), Matthews
patent: 5187121 (1993-02-01), Cote et al.
patent: 5413962 (1995-05-01), Lur et al.
patent: 5442237 (1995-08-01), Hughes et al.
Chang Mark S.
Cheung Robin W.
Advanced Micro Devices , Inc.
Everhart C.
Fourson George
LandOfFree
Method of decreased interlayer dielectric constant in a multilay does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of decreased interlayer dielectric constant in a multilay, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of decreased interlayer dielectric constant in a multilay will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1928261