Liquid purification or separation – Processes – Chemical treatment
Patent
1994-07-18
1996-08-27
Langel, Wayne
Liquid purification or separation
Processes
Chemical treatment
210763, 210766, 210928, 423531, 423556, 423579, C01B 1790, C02F 168
Patent
active
055498337
ABSTRACT:
The improved method achieves effective and economical decomposition of hydrogen peroxide and may be used in recycling hydrogen peroxide-containing spent sulfuric acid that has been used in wafer cleaning and other operations in the process of semiconductor fabrication or in removing residual hydrogen peroxide that will occur either within the papermaking process or in plant effluents as a consequence of a shift from chlorine-containing bleaching agents to oxygen-containing bleaching agents.
When coke was added in an amount of 10 wt % to a solution of 0.88 wt % hydrogen peroxide in 72.6 wt % sulfuric acid, followed by treatment at 60.degree.-70.degree. C. for 4 hours, the concentration of hydrogen peroxide dropped to 0.0001 wt % and below. When coke was added in an amount of 10 wt % to each of a solution (pH, 0.94) of 1.0 wt % hydrogen peroxide in 1.1 wt % sulfuric acid and a solution (pH, 2.58) of 1.04 wt % hydrogen peroxide in sulfuric acid followed by treatment at 60.degree.-70.degree. C. for 4 hours, the concentration of hydrogen peroxide dropped to 0.0001 wt % or below and 0.10 wt %, respectively.
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Abe Yuzuru
Hagimori Kenji
Kanke Tetsuo
Langel Wayne
Toshin Chemical Industry Co., Ltd.
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