Method of deciding focal plane and method of crystallization...

Details Method of deciding focal plane and method of crystallization... Method of deciding focal plane and method of crystallization...

2007-08-07

2007-08-07

Smoot, Stephen W. (Department: 2813)

Semiconductor device manufacturing: process

With measuring or testing

Optical characteristic sensed

C438S487000, C257SE21133, C117S904000

Reexamination Certificate

active

11017826

ABSTRACT:
A crystallization method is provided which improves a crystallization process by deciding a best-fit focal plane for a laser beam using a test mask and then applying the decided best-fit focal plane to the crystallization process. The crystallization method includes loading a test mask on a mask stage; deciding a best-fit focal plane by performing a crystallization test using the test mask, checking the test result and deciding conditions of a best-fit focal plane from the test result; moving the mask stage to a position corresponding to the best-fit focal plane; loading a mask for crystallization process onto the moved mask stage; and performing the crystallization process using the mask for crystallization process.

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