Method of creating pores in a thin sheet of polyimide

Details Method of creating pores in a thin sheet of polyimide Method of creating pores in a thin sheet of polyimide

2008-09-02

2008-09-02

Goudreau, George A. (Department: 1792)

Etching a substrate: processes

Etching to produce porous or perforated article

C216S057000, C216S087000, C216S094000, C264S413000

Reexamination Certificate

active

11131943

ABSTRACT:
The invention concerns a method which consists in first subjecting the polyimide sheet to ionic bombardment, followed by an irradiation in the visible domain and finally a relatively brief chemical etching. Said method enables a thin polyimide sheet comprising pores, of nanometric to micrometric size, having a substantially cylindrical shape and substantially equal diameters to be obtained.

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