Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Patent
1997-02-12
1999-02-02
Malley, Daniel
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
355 93, 355 67, 355 71, G03B 2754
Patent
active
058672532
ABSTRACT:
According to a method of correcting light proximity effect, a decision distance from one exposure point to the other exposure point, where influence of the light proximity effect appears, as well as a reference area ratio for deciding as to whether the light proximity effect correction is necessary or not are determined based on an optical condition of an exposure apparatus having a photomask attached thereto. Respective sides of a photomask pattern are divided into portions each having at most a prescribed length, and a ratio of an area occupied by the photomask pattern to an area of a circle having a middle point of each divided side as a center and the decision distance as a radius is determined for each of the divided sides. Comparing the area ratio for each of the divided sides with the reference area ratio for decision, a decision is made for each divided side as to whether the light proximity effect correction is necessary or not. Using this method, time required for calculation can be reduced, and highly precise correction can be made.
REFERENCES:
Otto, Oberdan W., et al., "Automated Optical proximity correction-a rules-based approach ", Optical/Laser Microlithography VII, Timothy A. Brunner, Editor, Proc. SPIE 2197, pp. 278-293, (Mar. 2-4, 1994).
Malley Daniel
Mitsubishi Denki & Kabushiki Kaisha
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