Method of correcting coordinates, and defect review apparatus

Details Method of correcting coordinates, and defect review apparatus Method of correcting coordinates, and defect review apparatus

2010-06-03

2011-10-11

Kasenge, Charles (Department: 2121)

Data processing: measuring, calibrating, or testing

Calibration or correction system

Position measurement

C700S110000, C382S149000

Reexamination Certificate

active

08036845

ABSTRACT:
The present invention provides a method of correcting coordinates so as to quickly and properly arrange a sample in a field of view in a review apparatus for moving a sample stage onto the specified coordinates to review the sample. A review apparatus according to the present invention, which is a review apparatus for moving a sample stage onto coordinates previously calculated by a checking apparatus to review the sample, has a function of retaining a plurality of coordinate correction tables to correct a deviation between a coordinate value previously calculated by a checking apparatus and an actual sample position detected by the review apparatus. The review apparatus evaluates correction accuracy of the plurality of coordinate correction tables and applies one of the coordinate correction tables with the maximum evaluation value.

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Japanese Office Action dated May 10, 2011 (three (3) pages).

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