Method of correcting a flare and computer program product

Details Method of correcting a flare and computer program product Method of correcting a flare and computer program product

2010-06-17

2011-10-18

Young, Christopher (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S030000, C382S144000

Reexamination Certificate

active

08039177

ABSTRACT:
A method of correcting a flare comprising: calculating a distribution of a flare value corresponding to pattern data on the pattern data as a flare map; calculating an occupancy of a pattern having a predetermined flare value on the pattern data as a flare value occupancy for each flare value, by using the flare map; determining a reference flare value to be a reference of the flare value based on the distribution of the flare value occupancy; and performing a pattern correction corresponding to the flare value with a pattern correction amount at the reference flare value as a reference.

REFERENCES:
patent: 6625802 (2003-09-01), Singh et al.
patent: 6815129 (2004-11-01), Bjorkholm et al.
patent: 6898781 (2005-05-01), Singh et al.
patent: 7234130 (2007-06-01), Word et al.
patent: 2007-524255 (2007-08-01), None
patent: WO2005/082063 (2005-09-01), None

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