Coating processes – Immersion or partial immersion
Reexamination Certificate
2005-08-30
2009-06-23
Barr, Michael (Department: 1792)
Coating processes
Immersion or partial immersion
C427S250000, C427S314000
Reexamination Certificate
active
07550179
ABSTRACT:
Methods of depositing a copper film onto the surface of a substrate from a supercritical solution containing copper-containing precursors having monoanionic bidentate and neutral monodentate ligands, which comprise contacting the substrate with the solution; heating the substrate to a temperature between about 60° C. and less than 150° C.; and forming a copper-containing film on at least a portion of the substrate surface. Also provided are copper-containing precursor compositions used therein.
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Bradley Alexander Zak
Park Kyung-Ho
Thompson Jeffrey Scott
Barr Michael
E.I du Pont de Nemours and Company
Schiro Ryan
Tanzer Gail D.
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