Method of controlling the partial pressure of at least one subst

Details Method of controlling the partial pressure of at least one subst Method of controlling the partial pressure of at least one subst

1982-07-22

1984-08-28

Ozaki, G.

Metal treatment

Compositions

Heat treating

148171, 148172, 148173, 156624, H01L 21208

Patent

active

044682581

ABSTRACT:
A method of controlling the partial pressure of at least one substance or substance mixture comprising arranging the substance or mixture of substances in a chamber, arranging at least one element containing the substance or mixture of substances in the chamber and selecting the structure or crystal structure of the element to provide the desired partial pressure in the chamber.

REFERENCES:
patent: 3533856 (1970-10-01), Panish et al.
patent: 3664294 (1972-05-01), Solomon
patent: 3752118 (1973-08-01), Solomon et al.
patent: 4227962 (1980-10-01), Antypas
Panish et al., J. of Crystal Growth, vol. 11, 1971, pp. 101-103, 156-624.

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