Method of controlling supersaturated injection and concentration

Details Method of controlling supersaturated injection and concentration Method of controlling supersaturated injection and concentration

1985-09-13

1987-06-02

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

2504923, B05D 306

Patent

active

046702911

ABSTRACT:
A method of controlling supersaturated injection of exotic atoms comprises previously preparing a parent material buried by exotic phases consisting Ge or Si, irradiating the parent material with the electron beams, and forming supersaturated injection regions of the exotic atoms to control the concentration profile of the exotic atoms. The method can control the distribution of concentration of exotic atoms by irradiating with electron beams of high energy.

REFERENCES:
patent: 2911533 (1959-11-01), Damask
patent: 4486247 (1984-12-01), Ecer et al.
patent: 4532149 (1985-07-01), McHargue

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