Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1996-12-06
1999-09-21
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
250307, G01B 1130
Patent
active
059556609
ABSTRACT:
An improved stable feedback control circuit for a scanning probe microscope has a vibrationally driven cantilever having a probe mounted at a distal end thereof at a frequency near the resonance frequency thereof and a light detector for measuring deflection of the cantilever in response to a repulsive force acting between the probe and a surface of a sample and producing a pair of output signals which vary depending upon deflection of the cantilever and a detected signal having the vibrating frequency of the cantilever as a fundamental frequency component thereof, a method for controlling the probe microscope comprising the steps of: producing a plurality of input signals for the feedback control circuit comprising a first input signal equivalent to the root-mean-square value of the detected signal and a second input signal equivalent to a difference between, or the sum of, the pair of output signals of the light detector, and adding the first and second input signals to produce a feedback control signal used for maintaining a constant distance between the probe and the sample surface.
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Noland Thomas P.
Seiko Instruments Inc.
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