Method of controlling multi-species epitaxial deposition

Details Method of controlling multi-species epitaxial deposition Method of controlling multi-species epitaxial deposition

1999-04-22

2000-03-14

Evans, F. L.

Optics: measuring and testing

With plural diverse test or art

G01N 2131

Patent

active

060380179

ABSTRACT:
An integrated dual beam multi-channel optical-based flux monitor and method of monitoring atomic absorption of a plurality of atomic species during epitaxial deposition. Light from multiple sources is simultaneously passed through a region of deposition of material such that atomic absorption takes place. The light that passed through the region is then compared to light in a reference arm that did not pass through a region of atomic absorption. From this comparison the deposition of an epitaxial layer can be carefully monitored and controlled.

REFERENCES:
patent: 5684574 (1997-11-01), Shiokawa et al.

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