Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Patent
1996-03-29
1999-10-12
Young, Christopher G.
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
G03F 900
Patent
active
059653086
ABSTRACT:
The exposure quantity with respect to a wafer is correctly measured under each illumination condition even when illumination conditions are changed over. Under each of conditions where the .sigma. value (coherence factor) of an illumination optical system is set to various values including its small, standard, and large values, a correlation data between the output (E) of a reference illuminance meter and the output (I) of an integrator sensor is obtained. With respect to the correlation data for the respective .sigma. values, approximate lines (24A, 24B, 24C, etc) are determined by the method of least squares and then gradients of these lines are stored as correlation coefficients (.alpha.). Under the illumination condition corresponding to each .sigma. value, the output (I) of the integrator sensor is divided by its corresponding correlation coefficient (.alpha.) so as to compute the exposure energy on the image surface.
REFERENCES:
patent: 4711568 (1987-12-01), Torigoe et al.
patent: 4908656 (1990-03-01), Suwa et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5191374 (1993-03-01), Hazama et al.
patent: 5309198 (1994-05-01), Nakagawa
patent: 5329336 (1994-07-01), Hirano et al.
patent: 5363171 (1994-11-01), Mack
patent: 5491534 (1996-02-01), Shiozawa
patent: 5561290 (1996-10-01), Strobel et al.
patent: 5608492 (1997-03-01), Sato
patent: 5627627 (1997-05-01), Suzuki
patent: 5677754 (1997-10-01), Makinouchi
patent: 5861944 (1999-01-01), Nishi
Nixon Corporation
Young Christopher G.
LandOfFree
Method of controlling exposure does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of controlling exposure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of controlling exposure will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-650609