Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1981-06-15
1983-08-02
Demers, Arthur P.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204192E, 204298, C23C 1500
Patent
active
043964788
ABSTRACT:
A method of control of chemico-thermal treatment of workpieces in a glow discharge comprising the steps of measuring the workpiece temperature, its rate of change and frequency of arc occurrence, comparing the measured quantities with their predetermined values, producing the corresponding error signals, and obtaining a control signal from the latter to control the glow discharge voltage.
A device for carrying out the method of the invention comprising a temperature sensor, a rate-of-change-of-temperature sensor, and an arc occurrence frequency sensor having their outputs connected to comparison elements adapted to compare said measured quantities with their predetermined values, and having their inputs connected to the workpieces and to leads of a discharge chamber. The comparison elements have their outputs coupled to the inputs of regulators of the temperature, its rate of change and frequency of arc occurrence, said regulators being coupled to a supply voltage source via a control unit. The corresponding inputs of the control unit are connected via a glow discharge voltage transmitter to the respective leads of the discharge chamber, the output of the transmitter being coupled to the corresponding inputs of the arc occurrence frequency sensor and control unit.
REFERENCES:
patent: 4074140 (1978-02-01), Edenhofer
patent: 4166783 (1979-09-01), Turner
patent: 4172020 (1979-10-01), Tisone et al.
patent: 4201645 (1980-05-01), Riegert
patent: 4274936 (1981-06-01), Love
patent: 4283260 (1981-08-01), Thomas et al.
Gartner et al., IBM Technical Disclosure Bulletin, vol. 20, #3, Aug. 1977.
Agres Evgeny L.
Aizenshtein Anatoly G.
Blinov Viktor N.
Kirichenko Vladimir V.
Kozlovsky Igor A.
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