Method of connecting a multiplicity of optical elements to a...

Details Method of connecting a multiplicity of optical elements to a... Method of connecting a multiplicity of optical elements to a...

2006-04-25

2006-04-25

Shafer, Ricky D. (Department: 2872)

Optical: systems and elements

Having significant infrared or ultraviolet property

C359S851000, C359S853000, C359S855000, C359S900000, C205S071000

Reexamination Certificate

active

07034998

ABSTRACT:
In a method of connecting a multiplicity of optical elements (9) to a basic body (8), in particular for producing a faceted mirror (1), for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements (9) are positioned on the basic body (8, 14) and subsequently connected to one another by an galvanoplastic process. Alternatively, the multiplicity of optical elements are aligned on an auxiliary structure (11) and the optical elements (9) are subsequently made to grow up galvanoplastically on their rear sides, forming a supporting structure (14) as the basic body.

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