Method of compliantly mounting a piezoelectric device

Metal working – Piezoelectric device making

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Details

310364, H01L 4122, H01L 4108

Patent

active

054066824

ABSTRACT:
A method of compliantly mounting piezoelectric device with a substrate. First, outer portions of a piezoelectric element are selectively metallized. Next, one layer of aluminum is selectively dispensed on the piezoelectric element. Third, an uncured conductive compliant material is placed and aligned on a substrate. Fourth, the piezoelectric element is placed and aligned on the conductive compliant material, such that upon curing the conductive compliant material forms a compliant mount connecting the outer metallized portions of the piezoelectric element with the substrate.

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patent: 2266768 (1941-12-01), Kornei
patent: 2510811 (1950-06-01), Gale
patent: 3128532 (1964-04-01), Massa
patent: 4217684 (1980-08-01), Brisken et al.
patent: 4293986 (1981-10-01), Kobayashi et al.
patent: 4472652 (1984-09-01), Brice et al.
patent: 4757581 (1988-07-01), Yamada et al.

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