Method of compensating for a volumetric shrinkage of a...

Details Method of compensating for a volumetric shrinkage of a... Method of compensating for a volumetric shrinkage of a...

2007-07-17

2007-07-17

Padgett, Marianne (Department: 1762)

Plastic and nonmetallic article shaping or treating: processes

Direct application of electrical or wave energy to work

Polymerizing, cross-linking, or curing

C427S495000, C427S508000, C427S510000, C427S512000, C264S405000, C264S447000, C264S479000, C264S481000

Reexamination Certificate

active

10951014

ABSTRACT:
The present invention provides a method of planarizing a substrate with a template spaced-apart from the substrate having a liquid disposed therebetween, the method including: contacting the liquid with the template forming a first shape therein; and impinging radiation upon the liquid causing a reduction in volume of the liquid, with the first shape compensating for the reduction in volume such that upon impinging the actinic radiation upon the liquid, the liquid forms a contoured layer having a substantially planar shape.

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