Method of coating silicon particles

Details Method of coating silicon particles Method of coating silicon particles

1989-12-13

1991-08-20

Pianalto, Bernard

Coating processes

Particles, flakes, or granules coated or encapsulated

Solid encapsulation process utilizing an emulsion or...

427215, 427255, 4272551, 427314, B05D 700

Patent

active

050413082

ABSTRACT:
An apparatus for heating polycrystalline silicon, in which polycrystalline silicon of semiconductor grade placed in the reaction vessel is directly heated by means of a heater outside of the reaction vessel where the inner surface of the reaction vessel is formed of graphite coated with highly pure silicon and having a thickness of 100 microns or more.

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