Method of coating flat glass with indium oxide

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

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4372552, 4372551, 437255, 437166, 437109, 437314, 65 6052, C23C 1640, B05D 506

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057730865

ABSTRACT:
The invention relates to the coating of flat glass with indium oxide. Indium oxide coatings, optionally doped, for example with tin, are produced in high yield by utilising a chemical vapour deposition process in which a gaseous mixture of a dialkylindium compound and a source of oxygen is directed on to the hot glass surface (The dialkylindium may also be used without pre-mixing but with separate supply of the oxygen source to the glass surface). The processes of the invention are especially suitable for application of a doped indium oxide coating to a continuous ribbon of glass on the production line on which the glass is formed, for use, for example, in architectural glazing applications utilising the low emissivity of the coating.

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Maruyama et al, J. Appl. Phys. 70(7), Oct. 1991, pp. 3848-3851.
Ozasa et al, J. Vac. Soc. Technol. A(12(1), Jan./Feb. 1994, pp. 120-124.
Maruyama et al, J. Appl. Phys. 71(6), Mar. 1992, pp. 2915-2917.
Mayer, Thin Solid Films, 221 (1992), pp. 166-182.
Maruyama et al, Jpn. J. Appl. Phys., Part 2, 28(7), 1989, L1096-L1097.

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