Coating processes – Spray coating utilizing flame or plasma heat – Silicon containing coating
Patent
1997-02-04
1998-12-29
Bareford, Katherine A.
Coating processes
Spray coating utilizing flame or plasma heat
Silicon containing coating
427456, 20429813, C23C 404
Patent
active
058538160
ABSTRACT:
This invention is relating to a sputter cathode (1) with a layer of material that is applied to a substrate by sputtering, wherein this layer (3) contains low electrical conductivity particles (3a) of which a certain quantity are at least coated by a film (3b) of electrically conductive material, or which form an aggregate with a conductive material, so as to give this layer (3) sufficient electrical conductivity to be able to be applied to the substrate by means of sputtering.
REFERENCES:
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patent: 4209375 (1980-06-01), Gates et al.
patent: 5047131 (1991-09-01), Wolfe et al.
patent: 5332601 (1994-07-01), Varacelle, Jr. et al.
patent: 5372845 (1994-12-01), Rangaswamy et al.
Thermal Spraying: Prachce, Theory, and Application, American Welding Society, 1985, p. 27. (no month date).
IBM Technical Disclosure Bulletin, vol. 22, No. 5, Oct., 1979, New York, USA; p. 1820, "Depositon of Silicon and Other Materials on Cathodes by Flame Spraying" by P.S. Grosewald, R.A. Holmwood, and F.M. Pressman.
Patent Abstracts of Japan, vol. 14, No. 334 (C-742) 18 Jul. 1990 & JP, A, 02 122 072 (Toyobo Co Ltd.) 9 May 1990.
Bareford Katherine A.
Emiel Vanderstraeten
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