Coating processes – Coating by vapor – gas – or smoke – Organic coating applied by vapor – gas – or smoke
Patent
1996-03-29
1997-11-25
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Organic coating applied by vapor, gas, or smoke
427259, 427282, 427287, B05D 132, B05D 136
Patent
active
056909985
ABSTRACT:
The present invention relates to a probe needle wherein a conductive film is formed over a first insulating film formed around the outer periphery of a rod-like member through which a signal current flows, a second insulating film is formed over the outer periphery of the conductive film, and the conductive film is grounded. Since the rod-like member through which a signal current flows is thereby shielded, it is not affected by noise, and mutual crosstalk between signal currents is also prevented. Moreover, since ill effects caused by mutual contact with other probe needles is prevented by the second insulating film, reliable and stable measurement is possible. The coating of the probe needle is implemented by covering non-coating portions of the probe needle by a melted thermally liquefiable wax, hardening the thermally liquefiable wax covering the non-coating portions at room temperature, applying a coating to the probe needle by vacuum deposition, heating the thermally liquefiable wax once again, and then removing the thermally liquefiable wax from the probe needle. As a result, a probe needle is obtained wherein a non-coating portion is reliably delimited from a coating portion by a masking boundary. When the coating process is completed, the probe needle could be subjected to washing to completely remove any remaining wax.
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Matsudo Masahiko
Nagasawa Yasushi
Yamashita Satoru
Beck Shrive
Parker Fred J.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Yamanashi Kabushiki Kaisha
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