Method of cleaning workpiece with solvent and then with liquid c

Details Method of cleaning workpiece with solvent and then with liquid c Method of cleaning workpiece with solvent and then with liquid c

1993-12-14

1995-05-23

Kastler, Scott

Cleaning and liquid contact with solids

Processes

Including regeneration, purification, recovery or separation...

134 11, 134 26, 134 30, 134 951, 134109, B08B 308, B08B 312

Patent

active

054177685

ABSTRACT:
A method for precision cleaning of a workpiece with a cleaning fluid comprising liquid and/or supercritical fluid carbon dioxide and a primary solvent which is liquid at ambient temperatures and pressures comprises first placing the workpiece in a pressurizable vessel with a removable lid and within an inner tank open at the top; supplying the primary solvent to the inner tank; flushing the primary solvent through the pressure vessel; draining the inner tank to remove the primary solvent; and then supplying liquid and/or supercritical fluid carbon dioxide to the pressure vessel and flushing it through the vessel by withdrawing it from near the bottom of the inner tank.

REFERENCES:
patent: 4750505 (1988-06-01), Inuta et al.
patent: 4788043 (1988-11-01), Kagiyama et al.
patent: 4832753 (1989-05-01), Cherry et al.
patent: 4936922 (1990-06-01), Cherry
patent: 4990260 (1991-02-01), Pisani
patent: 5013366 (1991-05-01), Jackson et al.
patent: 5073203 (1991-12-01), Al-Ghatta
patent: 5102504 (1992-04-01), Saito
patent: 5306350 (1994-04-01), Hoy et al.
patent: 5339844 (1994-08-01), Stanford, Jr. et al.

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