Method of cleaning wafers or the like

Details Method of cleaning wafers or the like Method of cleaning wafers or the like

1989-02-09

1990-11-27

Capossela, Ronald C.

Refrigeration

Storage of solidified or liquified gas

Liquified gas transferred as liquid

62303, 62384, F17C 902

Patent

active

049726773

ABSTRACT:
Liquid carbon dioxide substantially free of particles is prepared by evaporating liquid carbon dioxide, passing the resulting gaseous carbon dioxide through a suitable filter to remove particles therefrom and cooling the particle-free gas to reliquefy it.

REFERENCES:
patent: 1831644 (1931-11-01), Adair et al.
patent: 1891125 (1932-12-01), Van Gessel
patent: 4492593 (1985-01-01), Diaz
patent: 4717406 (1988-01-01), Giacobbe

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