Method of cleaning test probes

Details Method of cleaning test probes Method of cleaning test probes

1979-12-17

1982-02-09

Caroff, Marc L.

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

51323, 134 6, 134 26, 134 35, 134 41, B08B 308, B08B 310

Patent

active

043148557

ABSTRACT:
Contaminants that accumulate on test probes utilized to contact aluminum pads on integrated circuit chips cause the probe resistance to become unacceptably high. As disclosed herein, the contaminants (predominantly a mixture of aluminum and aluminum oxide) are substantially removed by immersing the probes in boiling water. Adding small quantities of phosphoric and/or hydrofluoric acids to the water further improves the cleaning action.

REFERENCES:
patent: 1804331 (1931-05-01), Freund
patent: 2622046 (1952-12-01), Bassett
patent: 3448055 (1969-06-01), Mickelson et al.
patent: 3598741 (1971-08-01), Kanno
patent: 4014715 (1977-03-01), Preston
patent: 4049471 (1977-09-01), Koontz
patent: 4198262 (1980-04-01), Gay

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