Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate
2007-10-17
2009-11-10
Stinson, Frankie L (Department: 1792)
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
Reexamination Certificate
active
07614406
ABSTRACT:
A method of cleaning a substrate without causing damage to the substrate is provided. The method comprises the steps of providing a transmitter made of a material that is a good conductor of megasonic energy, positioning the transmitter so that a lower edge is positioned spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the edge and the substrate, a meniscus of liquid is formed between the edge and the substrate, providing a transducer for producing megasonic vibration, coupling the transducer to the transmitter so that a transmission path is created to transmit the megasonic vibration into the transmitter, and creating a barrier in the transmission path so that the liquid vibration is attenuated directly beneath the lower edge of the transmitter.
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patent: 6379858 (2002-04-01), Perry et al.
patent: 6543080 (2003-04-01), Tomita et al.
patent: 2002/0066464 (2002-06-01), Bergman
patent: 04-025012 (1992-01-01), None
WIPO WO 90/14170 Nov. 1990.
Akrion Systems LLC
Stinson Frankie L
The Belles Group P.C.
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