Method of cleaning substrate

Details Method of cleaning substrate Method of cleaning substrate

1996-03-06

1997-10-21

Warden, Robert J.

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

134 2, 134 26, 134 28, 134 29, C03C 2300, B08B 300

Patent

active

056791712

ABSTRACT:
A method of cleaning the surface of a substrate, wherein the first step of the process of cleaning the substrate including a step of cleaning the surface of the substrate by an acidic solution, oxidizing solution, or alkaline solution, comprises a step of removing the natural oxide film formed on the surface of the substrate.

REFERENCES:
patent: 4795497 (1989-01-01), McConnell
patent: 4921572 (1990-05-01), Roche
patent: 5454901 (1995-10-01), Tsuji
patent: 5487398 (1996-01-01), Ohmi et al.
patent: 5571375 (1996-11-01), Izumi et al.

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