Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate
2011-06-28
2011-06-28
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
With treating fluid motion
C134S019000, C134S021000, C134S022180
Reexamination Certificate
active
07967917
ABSTRACT:
The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as semiconductor wafers, pellicles, or the like. The present invention: facilitates a regular cleaning operation, can be used also for a storage case of a complicated shape, does not require a large scale equipment or an expensive equipment to facilitate an environmental countermeasure, and provides high cleaning effect. The method of cleaning a storage case polluted by adhesion of a foreign substance of an organic material, an ionic foreign substances or an ionic crystal foreign substance physically absorbed, comprises a step of placing the storage case still in air flow of cleaned air or an inert gas in a temperature range from room temperature to 80° C. for desorbing and removing the foreign substance adhered to the storage case.
REFERENCES:
patent: 5238503 (1993-08-01), Phenix et al.
patent: 5991965 (1999-11-01), Stroh et al.
patent: 6770109 (2004-08-01), Tanaka et al.
patent: 0813230 (1997-12-01), None
patent: 2002110759 (2002-04-01), None
patent: 2004-053817 (2004-02-01), None
patent: 2006-011048 (2006-01-01), None
Kanda Nobuyuki
Nakajima Hiroyuki
Shimada Shu
Takahashi Noriyuki
Tanaka Hiroko
Campbell Natasha
Dai Nippon Printing Co. Ltd.
Kornakov Michael
Ladas & Parry LLP
LandOfFree
Method of cleaning storage case does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of cleaning storage case, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of cleaning storage case will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2654944