Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent
1990-09-27
1992-09-15
Morris, Theodore
Cleaning and liquid contact with solids
Processes
Using solid work treating agents
51319, 51320, B08B 700
Patent
active
051474662
ABSTRACT:
To remove foreign matter (contaminants in the form of fine particles or a film of oil) deposited on a solid surface, fine frozen particles (0.01 .mu.m to 5 mm in diameter) are used. The fine frozen particles, together with chilled nitrogen, are jetted onto the surface of a solid by the pressure of a carrier gas (nitrogen (N.sub.2) gas). These fine frozen particles are produced by freezing a liquid such as water (super pure water) or alcohol. The hardness of the fine frozen particles is adjusted according to the type of liquid, the frozen freezing temperature and jetting temperature in order to control the damage to the surface of the solid. Low temperature cleaning (0.degree. to -150.degree. C.) in which fine frozen particles and chilled nitrogen are sprayed is achieved.
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Fukumoto Takaaki
Kanno Itaru
Ohmori Toshiaki
Chaudhry Saeed
Mitsubishi Denki & Kabushiki Kaisha
Morris Theodore
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