Method of cleaning a glass substrate

Details Method of cleaning a glass substrate Method of cleaning a glass substrate

1997-08-11

1999-03-23

El-Arini, Zeinab

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 7, 15102, 15103, 1525022, B08B 700

Patent

active

058853634

ABSTRACT:
A squeegee unit is driven to rotate about a rotation axis perpendicular to a glass substrate surface with a motor while a plurality of blades of the squeegee unit contact on the substrate surface. The rotating squeegee unit is moved in a predetermined path on the substrate surface by relatively moving an X-Y stage so that its blades remove foreign materials adhered to the glass substrate surface.

REFERENCES:
patent: 5020180 (1991-06-01), Mimura
patent: 5551986 (1996-09-01), Jain

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