Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2006-09-19
2006-09-19
Wilson, Lee D. (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S028000
Reexamination Certificate
active
07108586
ABSTRACT:
Particles of strontium carbonate, barium carbonate, strontium sulfate and/or barium sulfate having a sufficient degree of fineness, especially when produced synthetically, are suitable as abrasive agents in chemical mechanical polishing (CMP polishing) of components, e.g., microelectronic components such as silicon wafers. The alkaline earth metal salt compounds are used as slurries in water and/or organic liquids and optionally may contain a dispersing agent, and preferably have a pH value of at least 8.
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Hardinghaus Ferdinand
Koehler Karl
Park Jai-Won
Solvay Barium Strontium GmbH
Wilson Lee D.
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