Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing gas sample
Reexamination Certificate
2009-08-18
2010-11-16
Warden, Jill (Department: 1797)
Chemical apparatus and process disinfecting, deodorizing, preser
Analyzer, structured indicator, or manipulative laboratory...
Means for analyzing gas sample
C422S105000, C436S003000
Reexamination Certificate
active
07833484
ABSTRACT:
In order to check the hermeticity of a closed cavity of at least one micrometric component, said component includes a structure made over or in one portion of a substrate, a cap fixed to one zone of the substrate to protect the structure, and an indicator element whose optical or electrical properties change in the presence of a reactive fluid. The indicator element may be a copper layer for an optical check or a palladium resistor for an electrical check. The micrometric component is placed in a container which is then hermetically closed. This container is filled with a reactive fluid under pressure, which is oxygen for the optical check and hydrogen for the electrical check. The component in the container is subjected to a reactive fluid pressure higher than 10 bars for a determined time period, and to thermal (T>100° C.) or optical (λ<500 nm) activation. After this time period, an optical or electrical check of the indicator element determines the hermeticity of said cavity.
REFERENCES:
patent: 4224565 (1980-09-01), Sosniak et al.
patent: 4282744 (1981-08-01), Dick
patent: 4920785 (1990-05-01), Etess
patent: 5307139 (1994-04-01), Tyson et al.
patent: 6040748 (2000-03-01), Gueissaz
patent: 6223586 (2001-05-01), Dierenbach et al.
patent: 6763702 (2004-07-01), Chien et al.
patent: 2002/0096421 (2002-07-01), Cohn et al.
patent: 2002/0142469 (2002-10-01), Li et al.
patent: 2003/0054588 (2003-03-01), Patel et al.
patent: 2003/0079999 (2003-05-01), Penner et al.
patent: 0 874 379 (1998-10-01), None
patent: 1 310 380 (2003-05-01), None
patent: 1 213 406 (1970-11-01), None
International Search Report issued in corresponding application No. PCT/EP2004/012626 completed Feb. 17, 2005 and mailed Mar. 1, 2005.
Waelti, M. et al., “Package Quality Testing Using Integrated Pressure Sensor”, 1998 International Symposium on Microelectronics, pp. 981-986.
Nese, Martin et al., “New Method for Testing Hermeticity of Silicon Sensor Structures”, The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, 1995, pp. 260-262.
Office Action issed in co-pending related U.S. Appl. No. 12/542,996, mailed Mar. 23, 2010.
Gueissaz François
Randin Jean-Paul
Asulab S.A.
Griffin & Szipl, P.C.
Ma Jameson Q
Warden Jill
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