Method of checking the hermeticity of a closed cavity of a...

Details Method of checking the hermeticity of a closed cavity of a... Method of checking the hermeticity of a closed cavity of a...

2004-11-08

2009-10-13

Warden, Jill (Department: 1797)

Chemistry: analytical and immunological testing

Process or composition for determination of physical state...

Leak detection

C436S001000, C436S002000, C073S040700, C073S049300

Reexamination Certificate

active

07601537

ABSTRACT:
In order to check the hermeticity of a closed cavity of at least one micrometric component, said component includes a structure made over or in one portion of a substrate, a cap fixed to one zone of the substrate to protect the structure, and an indicator element whose optical or electrical properties change in the presence of a reactive fluid. The indicator element may be a copper layer for an optical check or a palladium resistor for an electrical check. The micrometric component is placed in a container which is then hermetically closed. This container is filled with a reactive fluid under pressure, which is oxygen for the optical check and hydrogen for the electrical check. The component in the container is subjected to a reactive fluid pressure higher than 10 bars for a determined time period, and to thermal (T>100° C.) or optical (λ<500 nm) activation. After this time period, an optical or electrical check of the indicator element determines the hermeticity of said cavity.

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