Chemistry: analytical and immunological testing – Process or composition for determination of physical state... – Leak detection
Reexamination Certificate
2011-02-22
2011-02-22
Marcheschi, Michael A (Department: 1775)
Chemistry: analytical and immunological testing
Process or composition for determination of physical state...
Leak detection
C073S040700, C073S049300
Reexamination Certificate
active
07892839
ABSTRACT:
In order to check the hermeticity of a closed cavity of at least one micrometric component, said component includes a structure made over or in one portion of a substrate, a cap fixed to one zone of the substrate to protect the structure, and an indicator element whose optical or electrical properties change in the presence of a reactive fluid. The indicator element may be a copper layer for an optical check or a palladium resistor for an electrical check. The micrometric component is placed in a container which is then hermetically closed. This container is filled with a reactive fluid under pressure, which is oxygen for the optical check and hydrogen for the electrical check. The component in the container is subjected to a reactive fluid pressure higher than 10 bars for a determined time period, and to thermal (T>100° C.) or optical (λ<500 nm) activation. After this time period, an optical or electrical check of the indicator element determines the hermeticity of said cavity.
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Gueissaz François
Randin Jean-Paul
Asulab S.A.
Griffin & Szipl, P.C.
Ma Jameson Q
Marcheschi Michael A
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