Method of characterizing the level of cleanliness of an inorgani

Details Method of characterizing the level of cleanliness of an inorgani Method of characterizing the level of cleanliness of an inorgani

1992-05-04

1994-01-04

Breneman, R. Bruce

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 26, 134 42, B08B 310

Patent

active

052756670

ABSTRACT:
A fast and simple method of determining a desired level of cleanliness of an inorganic surface is performed by correlating a level of cleanliness of many inorganic surfaces having varying thicknesses of organic contamination with reliability tests. The level of cleanliness is in terms of a measurement from a water drop test. The level of cleanliness between two inorganic surfaces can also be compared by utilizing the combination of a UV/ozone clean and the level of cleanliness to determine the relative amount of contamination present on one inorganic surface as compared to the other.

REFERENCES:
patent: 3833842 (1974-09-01), Cunninham et al.
patent: 4028135 (1977-06-01), Vig et al.
patent: 4885047 (1989-12-01), Ury et al.
patent: 5028560 (1991-06-01), Tsukamoto et al.
Vig et al., UV/Ozone Cleaning of Surfaces, Dec. 1976, 365-370.

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