Method of characterizing optical parameters of opto-electronic c

Details Method of characterizing optical parameters of opto-electronic c Method of characterizing optical parameters of opto-electronic c

1991-08-01

1993-10-12

Wilczewski, Mary

Fishing, trapping, and vermin destroying

324613, H01L 2166

Patent

active

052524973

ABSTRACT:
In the commonly used methods for the coating of opto-electronic components, especially of semiconductor lasers, the layer thickness of a layer that is to be deposited is measured optically. The optical signal is converted into an electrical one with which the coating is controlled.
The invention relates to the purely electrical interpretation of the high frequency component of the electrical noise power of an opto-electronic component (3) when a direct current passes through it. From the noise power, a controlling computer (10) derives a signal for control of the layer thickness; this is fed into a coating apparatus (14) of a coating reactor (2) which has a reacting chamber (1) containing the component (3) to be coated.

REFERENCES:
patent: 4057441 (1991-10-01), Gutt et al.
patent: 5024853 (1991-06-01), Landreau et al.
patent: 5049811 (1991-09-01), Dreyer et al.
M. Serenyl, et al., "Directly Controlled Deposition. . . ", Applied Optics, Mar. 1, 1987, vol. 26, No. 5, pp. 845.

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