Method of characterizing dynamics of a workpiece handling system

Details Method of characterizing dynamics of a workpiece handling system Method of characterizing dynamics of a workpiece handling system

1996-09-12

1998-09-29

Williams, Hezron E.

Measuring and testing

Vibration

Sensing apparatus

36446816, 36447419, 364552, 324754, 324765, G01H 1108, G01R 3101, G01R 3102, G01R 3126

Patent

active

058147330

ABSTRACT:
A method of characterizing dynamics of a workpiece handling system includes providing a workpiece or substrate (14), supporting the substrate (14) with a workpiece handler (13), providing a motion for the workpiece handler (13), transforming the motion into a signal, converting the electrical signal into a measurement of distance, and using the measurement of distance to determine a vibration in the motion.

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Hewlett-Packard Co; "Signal Analyzers"; Test & Measurement Catalog, pp. 226-230; (1983).

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