Method of carrying and aligning a substrate

Details Method of carrying and aligning a substrate Method of carrying and aligning a substrate

1997-12-03

2000-04-11

Young, Christopher G

Radiation imagery chemistry: process, composition, or product th

Registration or layout process other than color proofing

430 30, 414786, 414936, 414937, G03F 900, B65G 4791

Patent

active

060486554

ABSTRACT:
An apparatus for carrying a substrate having a substrate storage part for storing substrate casings that encase substrates, and a carrier system for carrying the substrate to a substrate stage from the substrate storage part. The apparatus a first carrier device, a temporary storage part and a second carrier device. The first carrier device carries the substrate to a first substrate carry position from the substrate storage part. The temporary storage unit incorporates a holding mechanism for individually adsorptively holding the substrate by vacuum in a predetermined state and is provided between the first substrate carry position and the substrate stage. The second carrier device is capable of carrying the substrate to the substrate stage from the first carry position and also carrying the substrate between the temporary storage unit and the substrate stage.

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