Method of calibration, calibration substrate, and method of...

Details Method of calibration, calibration substrate, and method of... Method of calibration, calibration substrate, and method of...

2006-09-05

2006-09-05

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Methods

C355S053000, C430S030000

Reexamination Certificate

active

07102736

ABSTRACT:
A method of calibration according to one embodiment includes moving a table to a plurality of exposure positions. At each position, a first part of a measurement system measures a position of the table along each of two orthogonal axes in the plane, and a mark is exposed onto the substrate. For each mark, and for two different orientations of the substrate, a second part of the measurement system measures measurement positions of the table corresponding to the mark. Based on the measured positions, a characterization of a position measurement error of the measurement system along one of the orthogonal axes, as a function of position along both of the orthogonal axes, is obtained.

REFERENCES:
patent: 5363196 (1994-11-01), Cameron
patent: 6057921 (2000-05-01), Yao
patent: 7019843 (2006-03-01), Hill
patent: 2003/0035114 (2003-02-01), Hill
patent: 2005/0134862 (2005-06-01), Hill

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