Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-04-03
2007-04-03
Morgan, Eileen P. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S010000, C451S011000, C451S041000, C451S054000, C324S229000, C702S064000
Reexamination Certificate
active
11258654
ABSTRACT:
Methods are provided for calibrating a tool using an eddy current probe and calibration wafers that each have a measurable predetermined property and a measurement of the measurable predetermined property of a first calibration wafer is different than a measurement of the measurable predetermined property of a second calibration wafer. The methods include determining a first set of impedance measurements of the calibration wafers while each is disposed in the tool and the tool has a tool parameter that is at a first condition, collecting a second set of impedance measurements of the calibration wafers while each is disposed in the tool and the tool parameter is at a second condition, establishing a reference point, based upon a first and a second data point from the first set of impedance measurements and a first and a second data point from the second set of impedance measurements.
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Korovina, legal representative Tatyana
Stoya Robert J.
Ingrassia Fisher & Lorenz P.C.
Morgan Eileen P.
Novellus Systems Inc.
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