Method of calibrating zero offset of a pressure sensor

Details Method of calibrating zero offset of a pressure sensor Method of calibrating zero offset of a pressure sensor

2005-09-13

2008-07-01

Williams, Hezron E. (Department: 2856)

Measuring and testing

Instrument proving or calibrating

Fluid pressure

C073S708000, C073S715000, C073S727000

Reexamination Certificate

active

07392687

ABSTRACT:
A piezoresistive pressure sensor test sample is first provided, and a zero offset of the piezoresistive pressure sensor test sample is measured. Subsequently, a stress deviation corresponding to the zero offset is calculated. Thereafter, at least a piezoresistive pressure sensor under the same process condition as the piezoresistive pressure sensor test sample is formed. When forming the piezoresistive pressure sensor, at least a stress-adjusting thin film is formed on at least a surface of the piezoresistive pressure sensor to calibrate the zero offset of the piezoresistive pressure sensor.

REFERENCES:
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patent: 6120457 (2000-09-01), Coombes et al.
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patent: 6571599 (2003-06-01), Surjadi et al.
patent: 6644092 (2003-11-01), Oppel
patent: 6910381 (2005-06-01), Albert et al.
patent: 7025718 (2006-04-01), Williams

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